28-29 November 2019
ILL4
Europe/Paris timezone

Contribution of synchrotron radiation to the progress of an industrial process: SmartCut example

28 Nov 2019, 10:08
22m
ILL4-rdc-1 - Amphi Chadwick (ILL4)

ILL4-rdc-1 - Amphi Chadwick

ILL4

71 avenue des Martyrs 38000 Grenoble
110
Micro- & nano-electronics Industrial sessions: Keynote Speakers

Speakers

Dr. Francois Rieutord (CEA-Grenoble INAC) Dr. Oleg KONONCHUK (Soitec)

Description

Synchrotron radiation has become a very important tool in applied research because of its unique properties and capabilities. In this talk, these features are studied in the improvement of the SmartCut Process used by Soitec.

Primary author

Dr. Oleg KONONCHUK (Soitec)

Co-author

Dr. Francois Rieutord (CEA-Grenoble INAC)

Presentation Materials

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