Speakers
Dr
Francois Rieutord
(CEA-Grenoble INAC)Dr
Oleg KONONCHUK
(Soitec)
Description
Synchrotron radiation has become a very important tool in applied research because of its unique properties and capabilities. In this talk, these features are studied in the improvement of the SmartCut Process used by Soitec.
Primary author
Dr
Oleg KONONCHUK
(Soitec)
Co-author
Dr
Francois Rieutord
(CEA-Grenoble INAC)
